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crossrefApplied Sciences2021-10-13Cited by 61

A Review on Machine and Deep Learning for Semiconductor Defect Classification in Scanning Electron Microscope Images

Francisco López de la Rosa, Roberto Sánchez-Reolid, José L. Gómez-Sirvent, Rafael Morales, Antonio Fernández-Caballero

Continued advances in machine learning (ML) and deep learning (DL) present new opportunities for use in a wide range of applications. One prominent application of these technologies is defect detection and classification in the manufacturing industry in order to minimise costs and ensure customer satisfaction. Specifically, this scoping review focuses on inspection operations in the semiconductor manufacturing industry where different ML and DL techniques and configurations have been used for defect detection and classification. Inspection operations have traditionally been carried out by specialised personnel in charge of visually judging the images obtained with a scanning electron microscope (SEM). This scoping review focuses on inspection operations in the semiconductor manufacturing industry where different ML and DL methods have been used to detect and classify defects in SEM images. We also include the performance results of the different techniques and configurations described in the articles found. A thorough comparison of these results will help us to find the best solutions for future research related to the subject.

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crossrefApplied Sciences2025-09-15Cited by 10

Malicious URL Detection with Advanced Machine Learning and Optimization-Supported Deep Learning Models

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crossrefApplied Sciences2026-02-28

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Atrial fibrillation is the most prevalent sustained cardiac arrhythmia and a major risk factor for stroke, heart failure, and premature mortality. Automatic detection remains challenging due to the variability of electrocardiogram (ECG) morphology, noise, and the paroxysmal natur…

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crossrefApplied Sciences2026-01-03

Towards Intelligent Manufacturing: Machine Learning, Deep Learning, and Computer Vision for Tool Wear Estimation in Milling and Micromilling Processes

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In modern manufacturing, milling and micromilling processes play a central role in precision production. However, rapid wear of cutting tools often leads to sudden tool breakage, unplanned downtime, and part rejection. Maintenance is therefore essential to ensure efficiency, safe…

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crossrefApplied Sciences2025-09-30Cited by 3

Robustness of Machine Learning and Deep Learning Models for Power Quality Disturbance Classification: A Cross-Platform Analysis

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Accurate and robust power quality disturbance (PQD) classification is critical for modern electrical grids, particularly in noisy environments. This study presents a comprehensive comparative evaluation of machine learning (ML) and deep learning (DL) models for automatic PQD iden…

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crossrefApplied Sciences2025-07-19Cited by 10

Summarizing Recent Developments on Autism Spectrum Disorder Detection and Classification Through Machine Learning and Deep Learning Techniques

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Autism Spectrum Disorder (ASD) encompasses various neurological disorders with symptoms varying by age, development, genetics, and other factors. Core symptoms include decreased pain sensitivity, difficulty sustaining eye contact, incorrect auditory responses, and social engageme…

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